Epitaxial metallic electrodes, quantum dots, and wires for application in solid state qubit technology

Abstract

A road map for the fabrication of epitaxial metallic electrodes, quantum dots and wires is considered for potential application in solid-state qubit technology. The nanotechnology developed includes high quality low-roughness film epitaxy, probe lithography and subtractive techniques for the fabrication of epitaxial nanostructures with a lateral resolution down to 10 nm.