Analysis and Solution of Glass Cracking of Low Frequency Connector in Multi-Chip Module

J. Jin, R. Ren, H. Gou
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引用次数: 1

Abstract

Multi-chip modules contain a large number of bare chips, which are sensitive to moisture in the packaging atmosphere. In order to ensure the long-term reliability of this kind of modules, it is necessary to seal the module package. Low-frequency connector is an indispensable part of multi-chip module, which is used to transmit internal and external electrical signals of modules. During the screening test, the phenomenon of unqualified hermeticity of some sealed modules appeared. Modules exhibit a leak rate greater than 1.0×10-3 Pa•m3/s during the tracer gas helium (He) fine leak test. Further inspection of the low-frequency connector body reveals that there are slender cracks in the connector glass body. The analysis shows that the reason of glass cracking is the thermal stress level of the module during welding heating exceeds the tensile strength of the glass, which leads to failure. Temperature difference exists in different positions of the connector during laser welding of cover plate, and cannot be eliminated by welding process optimization. After eliminating the internal defects of the glass body, the problem of glass body cracking did not occur in the process of multi-round step-by-step screening test, and the sealing test of module products was qualified after each test.
多芯片模块中低频连接器玻璃破裂的分析与解决方法
多芯片模块包含大量裸芯片,对封装大气中的水分敏感。为了保证这类模块的长期可靠性,有必要对模块封装进行密封。低频连接器是多芯片模块不可缺少的组成部分,用于传输模块内部和外部的电信号。在筛选试验过程中,出现了部分密封模块密封性不合格的现象。在示踪气体氦(He)细泄漏测试中,模块的泄漏率大于1.0×10-3 Pa•m3/s。进一步检查低频连接器本体,发现连接器玻璃本体存在细长裂纹。分析表明,玻璃开裂的原因是焊接加热时模组的热应力水平超过了玻璃的抗拉强度,导致玻璃开裂。盖板激光焊接时,接头不同位置存在温度差,无法通过焊接工艺优化消除。在消除了玻璃体内部缺陷后,在多轮分步筛选测试过程中没有出现玻璃体开裂的问题,且每次测试后模组产品的密封测试合格。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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