Impact of reactive nitrogen flow on morphology, mechanical properties, and biocorrosion behavior of sputtered TiN coatings towards orthopedic applications

IF 2 3区材料科学 Q2 ENGINEERING, MECHANICAL

Surface Topography: Metrology and Properties Pub Date : 2023-07-07 DOI:10.1088/2051-672X/ace2db

L. Van Duong, D. Phuong, N. N. Linh, N. Q. Thinh, Dang Quoc Khanh, Rubanik Vasili, Bahrets Dzmitry

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Abstract

This work aimed to investigate the effects of reactive nitrogen flow on the morphology, mechanical properties, and biocorrosion behavior of TiN coatings deposited on Ti6Al4V alloys and Si (100) wafer by direct current (DC) magnetron sputtering technique. From analysis results of x-ray diffraction (XRD) and scanning electron microscope (SEM), it revealed that the preferred orientation of the coatings changed from TiN (111) to TiN (200) plane, and the surface morphology altered from faceted structures to closed sphere structures with the increasing reactive N2 flow. The high density and fine grain size of the coating deposited with a reactive N2 flow of 25 sccm resulted in the highest hardness (24.8 ± 1.8 GPa) and the best corrosion resistance. In addition, the friction coefficient was reduced owing to the decrease in the grain size as reactive N2 flow increased from 10 to 30 sccm. Compared with Ti6Al4V substrate, TiN coatings possess better corrosion resistance, suggesting that the coating is beneficial for improving the performance of the Ti6Al4V alloys.

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活性氮流动对溅射TiN涂层形貌、力学性能和生物腐蚀行为的影响

本研究旨在研究活性氮流动对直流磁控溅射技术沉积在Ti6Al4V合金和Si(100)晶片上的TiN涂层的形貌、力学性能和生物腐蚀行为的影响。x射线衍射(XRD)和扫描电镜(SEM)分析结果表明，随着反应N2流量的增加，涂层的择优取向由TiN(111)平面转变为TiN(200)平面，表面形貌由多面结构转变为封闭球体结构。在25 sccm的N2反应流中沉积的涂层密度高，晶粒细，具有最高的硬度(24.8±1.8 GPa)和最佳的耐蚀性。此外，当反应N2流量从10 sccm增加到30 sccm时，由于晶粒尺寸的减小，摩擦系数降低。与Ti6Al4V基体相比，TiN涂层具有更好的耐蚀性，表明TiN涂层有利于提高Ti6Al4V合金的性能。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Surface Topography: Metrology and Properties Materials Science-Materials Chemistry

CiteScore

4.10

自引率

22.20%

发文量

183

期刊介绍： An international forum for academics, industrialists and engineers to publish the latest research in surface topography measurement and characterisation, instrumentation development and the properties of surfaces.