PLASMA TREATMENT OF TITANIUM DIOXIDE FILM FOR BLACK TiO2

IF 0.5 Q4 PHYSICS, NUCLEAR

Problems of Atomic Science and Technology Pub Date : 2023-08-21 DOI:10.46813/2023-146-180

E. Frolova, V. Khomych, R. M. Kravchuk, O. Kolomys, Yu. M. Gudenko, O. Pylypchuk, V. Styopkin, A. Dobrovolskiy

引用次数: 0

Abstract

The results of the treatment of TiO2 film in volume discharge with an Ar/H2 mixture are presented. The treated film demonstrates the changes in transparency and conductivity. Raman spectra show no changes in the phase state of the film after plasma treatment.

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等离子体处理黑色二氧化钛薄膜

介绍了用Ar/H2混合气体体积放电处理TiO2薄膜的实验结果。处理后的薄膜显示出透明度和导电性的变化。拉曼光谱显示等离子体处理后膜的相态没有变化。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Problems of Atomic Science and Technology 物理-核科学技术

CiteScore

0.70

自引率

50.00%

发文量

审稿时长

2-4 weeks

期刊介绍： The journal covers the following topics: Physics of Radiation Effects and Radiation Materials Science; Nuclear Physics Investigations; Plasma Physics; Vacuum, Pure Materials and Superconductors; Plasma Electronics and New Methods of Acceleration.