MEMS-based angular rate sensors

Abstract

The development of MEMS-based angular rate sensors offers revolutionary improvements in low power, size, and cost. Driven by high-volume commercial market needs, applications continue to grow for modestly performing components at prices below $10/axis. The continued maturation of the technology will enable new applications and markets to be realized. The paper reviews the development of MEMS-based angular rate sensors in Samsung and the applications to consumer electronics.