{"title":"Assessing the wear degradation of tungsten in acidic solutions using a lubricated tribocorrosion model","authors":"Shoufan Cao, Zhang Xu, Yi Liang, S. Mischler","doi":"10.1177/13506501231194668","DOIUrl":null,"url":null,"abstract":"The tribocorrosion property of tungsten plays a great role in the chemical mechanical polishing of tungsten plugs used in integrated circuits. This study applied a lubricated tribocorrosion model to tungsten, verified and calibrated the model using results from laboratory tribocorrosion experiments, and predicted the effect of the key parameters on the mechanical and chemical wear behavior of tungsten. The results showed that the model could be successfully applied to the tribocorrosion of tungsten considering that the prevailing wear mechanism and the electrochemical corrosion property of tungsten fulfills the model's basic concepts. The model was able to predict the influence of the material, mechanical, electrochemical and rheological parameters on the mechanical wear and chemical wear behavior of tungsten. The model could clearly distinguish the contribution of the mechanical wear and chemical wear to the total wear degradation of tungsten, which provides useful instructions on how to control the related parameters in order to obtain tailored removal rate and surface quality in tungsten's chemical mechanical polishing process.","PeriodicalId":20570,"journal":{"name":"Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology","volume":null,"pages":null},"PeriodicalIF":1.6000,"publicationDate":"2023-08-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1177/13506501231194668","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, MECHANICAL","Score":null,"Total":0}
引用次数: 0
Abstract
The tribocorrosion property of tungsten plays a great role in the chemical mechanical polishing of tungsten plugs used in integrated circuits. This study applied a lubricated tribocorrosion model to tungsten, verified and calibrated the model using results from laboratory tribocorrosion experiments, and predicted the effect of the key parameters on the mechanical and chemical wear behavior of tungsten. The results showed that the model could be successfully applied to the tribocorrosion of tungsten considering that the prevailing wear mechanism and the electrochemical corrosion property of tungsten fulfills the model's basic concepts. The model was able to predict the influence of the material, mechanical, electrochemical and rheological parameters on the mechanical wear and chemical wear behavior of tungsten. The model could clearly distinguish the contribution of the mechanical wear and chemical wear to the total wear degradation of tungsten, which provides useful instructions on how to control the related parameters in order to obtain tailored removal rate and surface quality in tungsten's chemical mechanical polishing process.
期刊介绍:
The Journal of Engineering Tribology publishes high-quality, peer-reviewed papers from academia and industry worldwide on the engineering science associated with tribology and its applications.
"I am proud to say that I have been part of the tribology research community for almost 20 years. That community has always seemed to me to be highly active, progressive, and closely knit. The conferences are well attended and are characterised by a warmth and friendliness that transcends national boundaries. I see Part J as being an important part of that community, giving us an outlet to publish and promote our scholarly activities. I very much look forward to my term of office as editor of your Journal. I hope you will continue to submit papers, help out with reviewing, and most importantly to read and talk about the work you will find there." Professor Rob Dwyer-Joyce, Sheffield University, UK
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