Assessing the wear degradation of tungsten in acidic solutions using a lubricated tribocorrosion model

IF 1.6 3区工程技术 Q3 ENGINEERING, MECHANICAL

Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology Pub Date : 2023-08-10 DOI:10.1177/13506501231194668

Shoufan Cao, Zhang Xu, Yi Liang, S. Mischler

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引用次数: 0

Abstract

The tribocorrosion property of tungsten plays a great role in the chemical mechanical polishing of tungsten plugs used in integrated circuits. This study applied a lubricated tribocorrosion model to tungsten, verified and calibrated the model using results from laboratory tribocorrosion experiments, and predicted the effect of the key parameters on the mechanical and chemical wear behavior of tungsten. The results showed that the model could be successfully applied to the tribocorrosion of tungsten considering that the prevailing wear mechanism and the electrochemical corrosion property of tungsten fulfills the model's basic concepts. The model was able to predict the influence of the material, mechanical, electrochemical and rheological parameters on the mechanical wear and chemical wear behavior of tungsten. The model could clearly distinguish the contribution of the mechanical wear and chemical wear to the total wear degradation of tungsten, which provides useful instructions on how to control the related parameters in order to obtain tailored removal rate and surface quality in tungsten's chemical mechanical polishing process.

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使用润滑摩擦腐蚀模型评估钨在酸性溶液中的磨损退化

钨的摩擦腐蚀性能对集成电路用钨塞的化学机械抛光起着很大的作用。本研究将润滑摩擦腐蚀模型应用于钨，利用实验室摩擦腐蚀实验结果对模型进行了验证和校准，并预测了关键参数对钨力学和化学磨损行为的影响。结果表明，考虑到钨的普遍磨损机理和电化学腐蚀特性符合模型的基本概念，该模型可以成功地应用于钨的摩擦腐蚀。该模型能够预测材料、力学、电化学和流变参数对钨的机械磨损和化学磨损行为的影响。该模型能够清晰地区分机械磨损和化学磨损对钨总磨损退化的贡献，为钨化学机械抛光过程中如何控制相关参数以获得定制的去除率和表面质量提供了有益的指导。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology 工程技术-工程：机械

CiteScore

4.20

自引率

5.00%

发文量

110

审稿时长

6.1 months

期刊介绍： The Journal of Engineering Tribology publishes high-quality, peer-reviewed papers from academia and industry worldwide on the engineering science associated with tribology and its applications. "I am proud to say that I have been part of the tribology research community for almost 20 years. That community has always seemed to me to be highly active, progressive, and closely knit. The conferences are well attended and are characterised by a warmth and friendliness that transcends national boundaries. I see Part J as being an important part of that community, giving us an outlet to publish and promote our scholarly activities. I very much look forward to my term of office as editor of your Journal. I hope you will continue to submit papers, help out with reviewing, and most importantly to read and talk about the work you will find there." Professor Rob Dwyer-Joyce, Sheffield University, UK This journal is a member of the Committee on Publication Ethics (COPE).