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High impact-induced failure of a novel solid MEMS switch

IEEE International Conference on Nano/Micro Engineered and Molecular Systems. IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2013-01-01 DOI:10.1109/NEMS.2013.6559838
Y. Wang, W. Lou, Yuecen Zhao, Fufu Wang
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一种新型固体MEMS开关的高冲击诱发失效
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IEEE International Conference on Nano/Micro Engineered and Molecular Systems. IEEE International Conference on Nano/Micro Engineered and Molecular Systems
IEEE International Conference on Nano/Micro Engineered and Molecular Systems. IEEE International Conference on Nano/Micro Engineered and Molecular Systems
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