Design and Analysis of Micro Actuator through Trapezoidal Shaped Electrostatic Comb Drive and Curved Beam System

Abstract

Electrostatic actuators have a significant role in Microelectromechanical Systems (MEMS). Electrostatic comb drive actuator with trapezoidal-shaped geometry is reliable as compared to a rectangular shaped system because of maximum displacement and large driving force. The limitation in the use of the trapezoidal-shaped electrostatic actuating system is a pull-in phenomenon because of the angular effect and large driving voltage. In this research work, a trapezoidal-shaped comb-drive actuator with curved flexures is designed and analyzed to minimize driving voltage through the low stiffness of curved beams. With a driving voltage of 36.6V, displacement of 25μm is achieved in this research work. A comparison of these results with published works is also presented and discussed.