{"title":"Deposition of AlN thin film at room temperature by pressure gradient sputtering and evaluation of practicality by 3ω method","authors":"Masataka Hase, M. Takashiri","doi":"10.2978/jsas.35101","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":14991,"journal":{"name":"Journal of Advanced Science","volume":"55 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2023-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Advanced Science","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.2978/jsas.35101","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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