Layer by layer thin film fabrication with in-process laser patterning

K. Leake, Alexandria Carter, H. Yochum
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Abstract

A modification of the traditional layer by layer process where the substrate is irradiated with laser light during the polycation and/or polyanion dipping cycles is described. By adjusting the laser irradiation time during dipping, irradiation power, number of bilayers, and the location and speed of laser irradiation, a variety of structures with controlled thicknesses can be fabricated. Laser patterned multilayer PAH/PTEBS polymer thin films were fabricated and characterized with absorbance mapping to demonstrate several patterning approaches. Results for 1) two laser patterned tracks, 2) single laser patterned track with varied average laser power across the sample from a continuously variable neutral density filter, and 3) laser patterning using a beam sent through multiple circular apertures are described. Based on the variable neutral density filter laser pattern, for 20 bilayer PAH/PTEBS films, an absorbance difference between off and on pattern of 0.1 requires an average laser power of less than 15 mW at 405 nm. The patterns produced are on the scale of several millimeters, though they could be made much smaller by focusing the laser used for patterning.
一层一层的薄膜制造过程中的激光图像化
本文描述了对传统的一层一层工艺的改进,其中在多阳离子和/或聚阴离子浸渍循环期间用激光照射衬底。通过调整浸渍时的激光照射时间、照射功率、双层层数以及激光照射的位置和速度,可以制备出各种厚度可控的结构。制备了激光图像化的多层PAH/PTEBS聚合物薄膜,并用吸光度映射法对其进行了表征。描述了1)两个激光图图化轨迹,2)连续可变中性密度滤波器在样品上具有不同平均激光功率的单激光图图化轨迹,以及3)使用通过多个圆孔发送的光束进行激光图图化的结果。基于可变中性密度滤波器的激光模式,对于20层双层PAH/PTEBS薄膜,关闭和打开模式之间的吸光度差为0.1,需要在405 nm处的平均激光功率小于15 mW。所产生的图案在几毫米的尺度上,尽管它们可以通过聚焦用于图案的激光而变得更小。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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