Studying the dependence of the properties of titanium coatings on the technological modes of microplasma sputterer UGNP-7/2250

M. E. Goshkoderya, N. A. Serdyuk, T. Bobkova, A. A. Kashirina, M. V. Staritsin, E. D. Nesterova
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Abstract

The results of optimizing the technological modes of deposition of titanium coatings by the microplasma method are presented in order to identify the most productive one. Variable values of the current strength of the electric arc, the flow rates of the plasma-forming and transporting gases were used as variable parameters. The sputtering material was PTOM-1 grade titanium powder of various fractional compositions: 20–32, 32–40, and 40–71 µm. A series of experiments was carried out on a combination of a number of factors. The following factors were considered: a coating thickness of at least 200 μm, the exclusion of sintering of the sprayed powder in the channels of the plasma torch, low porosity of the coating (no more than 5%), a tight fit of the coating to the substrate, and the exclusion of delamination of the coating during mechanical processing. As a result, the most optimal modes of coating deposition were identified. For coatings with the lowest porosity (from 1.0 to 1.9%), when all the above indicators were achieved, the morphology and microhardness were studied. According to the SEM microimages of transverse sections, it was determined that the coatings adhere tightly to the substrate material, there are no areas with delamination of the coating, and the microhardness of the coatings is in the range of 685–744 HV. 
研究了微等离子体溅射UGNP-7/2250工艺模式对钛镀层性能的影响
通过对微等离子体法制备钛涂层的工艺模式进行了优化,找出了效率最高的工艺模式。以电弧电流强度、等离子体形成和输送气体的流速为可变参数。溅射材料为20-32、32-40和40-71µm不同分数成分的PTOM-1级钛粉。对若干因素的组合进行了一系列实验。考虑了以下因素:涂层厚度至少为200 μm,防止喷涂粉末在等离子炬通道中烧结,涂层孔隙率低(不超过5%),涂层与基体紧密贴合,以及在机械加工过程中防止涂层分层。最终确定了最优的涂层沉积模式。对于孔隙率最低的涂层(1.0 ~ 1.9%),在达到上述指标后,研究其形貌和显微硬度。通过扫描电镜(SEM)的横截面显微图像,确定涂层与基体材料粘附紧密,无涂层分层现象,涂层显微硬度在685 ~ 744 HV之间。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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