Sputtered ZnO Films as Electron Transport Layers for Efficient Planar Perovskite Solar Cells

Abstract

To modify the stoichiometry and enhance electronic transportation of electron transport layers (ETLs) potentially for the large-scale high performance planar perovskite solar cells (PSCs) on the flexible substrate, ZnO films as ETLs with controlled stoichiometry are fabricated by magnetron sputtering method under a mixture working gases of Ar and O}}$_{\mathbf{2}}$ at room temperature.The impact of Ar/O}$_{\mathbf{2}}$ ratios on the structural, electrical, and optical properties of ZnO films is systematically investigated and the photovoltaic performance of the PSCs is strongly dependent on the properties of the sputtered ZnO ETLs.