Topology optimization of electromechanical microsystems against pull-in voltage

Abstract

The present work is dedicated to the application of topology optimization in the multiphysics field of MEMS. Precisely, it describes how it is possible to maximize pull-in voltage of an electromechanical microsystem for which the optimization domain is insulated from the electric field. The electromechanical coupling is modeled by the use of a monolithic analysis. The optimization task is completed with the help of a sequential convex linear approximation schemes (CONLIN)