Thin Films Deposited by Spin Coating Technique: Review

H. Soonmin
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引用次数: 1

Abstract

Nanostructure thin films have been prepared and deposited onto various substrates such as glass substrate, quartz, GaN (0001) substrate, indium tin oxide coated glass, soda-lime glass, microscope glass slide via spin coating technique. This deposition method has many advantages, such as being cheap, simple, suitable for the low-temperature deposition process. Literature review revealed that the deposition process was carried out at different conditions produced unique properties of films. Structural, morphological, and optical properties were studied by X-ray diffraction, scanning electron microscopy, atomic force microscopy, and UV-Visible spectrophotometer. It was found that the average grain size of the obtained films was in the nanometer scale. The research findings confirmed that these materials could be used for photovoltaic applications.
旋转镀膜技术沉积薄膜的研究进展
利用自旋镀膜技术制备了纳米结构薄膜,并将其沉积在各种衬底上,如玻璃衬底、石英、GaN(0001)衬底、氧化铟锡镀膜玻璃、钠石灰玻璃、显微镜玻片等。该沉积方法具有成本低廉、操作简单、适用于低温沉积工艺等优点。文献综述表明,在不同条件下进行的沉积工艺制备出了性能独特的薄膜。通过x射线衍射、扫描电子显微镜、原子力显微镜和紫外可见分光光度计对其结构、形态和光学性质进行了研究。结果表明,所得薄膜的平均晶粒尺寸在纳米级。研究结果证实,这些材料可以用于光伏应用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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