Determination of phosphine by packed column gas chromatography with alkali flame ionisation detection

Abstract

A method for the determination of phosphine using packed column isothermal gas chromatography has been developed and validated. The limit of detection is 0.01 ng ml–1 and response is linear over the ranges 0.1–1.0 and 2.5–25 ng ml–1. Reproducibility at 0.1 ng ml–1 was found to be 12.1% RSD. The method has been used to establish that phosphine is outgassed by newly fabricated semi-conductor devices containing phosphide compounds as dopants and is present in flatus of human origin.