Magnetically actuated swing-type micromirror

2013 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2013-11-11 DOI:10.1109/OMN.2013.6659064

H. Chang, Chun-Wei Tsai, Shih-Hsiang Liu, J. Tsai

引用次数: 1

Abstract

This paper presents a 45°-assembled swing-type micromirror fabricated with the SOIMUMPs process. Magnetic beads are attached to the backside of the mirror, making it possible to actuate the mirror magnetically. A swing range of > 16° is achieved. The device can be used in optical interconnects and optical pickup heads.

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磁致动摆动式微镜

本文介绍了一种用SOIMUMPs工艺制作的45°装配摆动式微镜。磁珠附着在镜子的背面，使得用磁力驱动镜子成为可能。可实现> 16°的摆动范围。该器件可用于光互连和光拾取头。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2013 International Conference on Optical MEMS and Nanophotonics (OMN)

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