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Optimization in the nanostructural evolution of hydrogenated silicon germanium thin film in RF-PECVD

Physica E: Low-dimensional Systems and Nanostructures Pub Date : 2019-07-01 DOI:10.1016/J.PHYSE.2019.02.024
D. Das, A. Dey
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引用次数: 9
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RF-PECVD中氢化硅锗薄膜纳米结构演化的优化
本文章由计算机程序翻译，如有差异，请以英文原文为准。
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Physica E: Low-dimensional Systems and Nanostructures
Physica E: Low-dimensional Systems and Nanostructures
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