An approach to model and optimization of manufacturing of an enhanced swing differential Colpitts oscillator. on influence of miss-match induced stress

E. Pankratov
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Abstract

In this paper we introduce an approach to increase density of field-effect transistors framework an enhanced swing differential Colpitts oscillator. Framework the approach we consider manufacturing the oscillator in heterostructure with specific configuration. Several required areas of the heterostructure should be doped by diffusion or ion implantation. After that dopant and radiation defects should by annealed framework optimized scheme. We also consider an approach to decrease value of mismatch-induced stress in the considered heterostructure. We introduce an analytical approach to analyze mass and heat transport in heterostructures during manufacturing of integrated circuits with account mismatch-induced stress
一种增强摆差式柯氏振荡器的建模与制造优化方法。失配诱导应力的影响
本文介绍了一种利用增强摆幅差分柯氏振荡器来提高场效应晶体管密度的方法。在此框架下,我们考虑制造具有特定构型的异质结构振荡器。异质结构的一些需要的区域应该通过扩散或离子注入进行掺杂。然后对掺杂和辐射缺陷采用退火框架优化方案。我们还考虑了一种减小异质结构中错配应力值的方法。本文介绍了一种分析集成电路制造过程中不匹配应力引起的异质结构质量和热量传递的分析方法
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