Effect of electrical discharge on silane and ammonia

Journal of The Chemical Society A: Inorganic, Physical, Theoretical Pub Date : 1971-01-01 DOI:10.1039/J19710002587

J. Drake, N. Westwood

引用次数: 4

Abstract

The effect of both ozoniser-type silent electric discharges and microwave discharges on silane, ammonia, and silane–ammonia mixtures is discussed. Silicon nitride films are formed in the microwave discharge of the latter.

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放电对硅烷和氨的影响

讨论了臭氧发生器型无声放电和微波放电对硅烷、氨和硅烷-氨混合物的影响。在后者的微波放电中形成氮化硅薄膜。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Journal of The Chemical Society A: Inorganic, Physical, Theoretical

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