Yu-Ming Lin, Cheng-Yu Lee, Yu-Lien Chen, Chih-Pin Pan, Cheng-En Ho
{"title":"Significantly improving the mechanical/electrical characteristics of blind-hole Cu filling through crystal coherent modification","authors":"Yu-Ming Lin, Cheng-Yu Lee, Yu-Lien Chen, Chih-Pin Pan, Cheng-En Ho","doi":"10.1016/j.surfcoat.2022.128111","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":22031,"journal":{"name":"Surface and Coatings Technology","volume":"5 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Surface and Coatings Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1016/j.surfcoat.2022.128111","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}