Theoretical study of a microwave system for the plasma microwave excited excimer laser

Abstract

The plasma microwave excited excimer laser is one of the most attractive topics in science and technology. This kind of excimer laser has many advantages, such as very simple construction, low cost, ease of use, etc. There are some different structures of this laser. One of the simplest structures is shown here: a rectangular waveguide with a circular cylindrical dielectric tube located in the center of the waveguide, where the dielectric tube is filled with an appropriate gas. If the wave power is high enough, a plasma may be produced, which is either free or magnetized plasma depending on the presence of an external magnetic field. Higher microwave power will then excite the excimer laser. A theoretical study of the microwave system is given in the paper. The dispersion equations of this system for both the free and magnetized plasma filling have been derived. The numerical calculations are continuing.