Modified standard screen-printing technology for processing of free-standing physical and chemical sensors

Abstract

Though silicon technology allows the processing of MEMS, alternative technologies are also attractive and have been developed for a few years. Potential achievement of organic and inorganic thick-film MEMS is studied through the association of the sacrificial layer process to the well-known screen-printing technology used for the fabrication of low cost components and microelectronic circuits. Organic and inorganic microstructures are successfully fabricated and tested for force, vibration or gas detection.