Research on Open Resonator at 35 GHz for Plasma Diagnosis

Abstract

This paper presents an open resonator at 35 GHz for plasma diagnosis. The resonator combines the closed cavity with the antenna. According to the hole coupling theory, the resonant mode in the cavity can be converted into the propagation mode of the antenna. After the plasma is loaded, the reflection coefficient of the antenna will be affected, thereby disturbing the resonance mode in the cavity. In view of the phenomenon, a measurement for the plasma electron density ($N_{e}$) based on resonance theory will be realized.