Processes controlling the rate of In/sub 2/O/sub 3/ thin film gas sensor's response

Abstract

The kinetics of gas response to reducing and oxidizing gases of In/sub 2/O/sub 3/-based thin film gas sensors is analyzed in this report. The influence of operating temperature, air humidity and film thickness (d from 20 to 400 nm) on both the E/sub act/ and time constants of gas response is reviewed. Model conceptions allowing to explain specific character of In/sub 2/O/sub 3/ interaction with reducing and oxidizing gases are proposed.