{"title":"Retardation and suppression of nickel silicide formation by N+ implantation","authors":"D. M. Scott, L. Wielunski, H. Seefeld, M. Nicolet","doi":"10.1016/0029-554X(81)90793-X","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":100971,"journal":{"name":"Nuclear Instruments and Methods","volume":"5 1","pages":"661-666"},"PeriodicalIF":0.0000,"publicationDate":"1981-04-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"14","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nuclear Instruments and Methods","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1016/0029-554X(81)90793-X","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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