Surface emitting quantum cascade lasers

Infrared and Millimeter Waves, Conference Digest of the 2004 Joint 29th International Conference on 2004 and 12th International Conference on Terahertz Electronics, 2004. Pub Date : 2004-01-01 DOI:10.1109/ICIMW.2004.1422001

C. Pflügl, S. Golka, M. Austerer, W. Schrenk, A. Andrews, G. Strasser

引用次数: 2

Abstract

We present single mode surface emitting quantum cascade lasers (QCLs). Efficient surface emission of QCLs is obtained by a second-order surface grating. More complicated structures, e.g. photonic crystals, require very high aspect ratio dry etching. We provide a short overview of chlorine based plasma etching and discuss the limitations on accuracy and the impact of different process parameters on etch profiles and depths.

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表面发射量子级联激光器

提出了单模表面发射量子级联激光器(qcl)。利用二阶表面光栅获得了高效的qcl表面发射。更复杂的结构，如光子晶体，需要非常高的纵横比干刻蚀。我们提供了氯基等离子体蚀刻的简要概述，并讨论了精度的限制和不同的工艺参数对蚀刻轮廓和深度的影响。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Infrared and Millimeter Waves, Conference Digest of the 2004 Joint 29th International Conference on 2004 and 12th International Conference on Terahertz Electronics, 2004.

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