{"title":"Low-loss waveguiding in ion-assisted-deposited thin films","authors":"L.N. Binh, R.P. Netterfield, P.J. Martin","doi":"10.1016/0378-5963(85)90198-9","DOIUrl":null,"url":null,"abstract":"<div><p>Reduction in the scattering losses of ZrO<sub>2</sub>, Al<sub>2</sub>O<sub>3</sub>, CeO<sub>2</sub> and Ta<sub>2</sub>O<sub>5</sub> waveguides fabricated on BK-7 glass substrates using ion-assisted evaporation techniques has been achieved. The lowest losses have been observed for an Al<sub>2</sub>O<sub>3</sub> ion-assisted film using 1200 eV O<sub>2</sub><sup>1</sup>. These losses are of the order of 2–5 dB cm<sup>−1</sup> and compare with > 15–20 dB cm<sup>1</sup> for evaporated guides produced without ion assistance.</p></div>","PeriodicalId":100105,"journal":{"name":"Applications of Surface Science","volume":"22 ","pages":"Pages 656-662"},"PeriodicalIF":0.0000,"publicationDate":"1985-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0378-5963(85)90198-9","citationCount":"17","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Applications of Surface Science","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/0378596385901989","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 17
Abstract
Reduction in the scattering losses of ZrO2, Al2O3, CeO2 and Ta2O5 waveguides fabricated on BK-7 glass substrates using ion-assisted evaporation techniques has been achieved. The lowest losses have been observed for an Al2O3 ion-assisted film using 1200 eV O21. These losses are of the order of 2–5 dB cm−1 and compare with > 15–20 dB cm1 for evaporated guides produced without ion assistance.
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