Polymeric waveguides with bio(chemical) sensing applications-design and preliminary experimental results

Abstract

In this paper we describe the preliminary experiments for a polymeric (bio)chemical sensor-integrated on silicon substrate, based on the far-field interferometric method. The basic structure of the sensor consists of a sandwich-waveguide polymeric structure. Several experimental studies have been performed in order to optimize the technological flow. We also have performed design studies in order to optimize the proposed structure.