On-Chip Photocurrent Displacement Sensor Based on a Waveguide-Coupled Nanomechanical Photonic Crystal Cavity

Abstract

A nano-opto-electro-mechanical transducer for displacement sensing is presented. It consists of a double-membrane photonic crystal cavity integrated with electro-optical read-out and on-chip light-delivery. The operation is demonstrated by atomic force microscope actuation and photocurrent sensing.