J. Hirvonen
{"title":"Ion Beam Assisted Thin Film Deposition","authors":"J. Hirvonen","doi":"10.1016/0920-2307(91)90008-B","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":100891,"journal":{"name":"Materials Science Reports","volume":"160 1","pages":"215-274"},"PeriodicalIF":0.0000,"publicationDate":"1991-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"108","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Materials Science Reports","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1016/0920-2307(91)90008-B","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 108