Analysis, fabrication and testing of ultra high pressure microchannels using LTCC technology

Abstract

Several MEMS applications including microturbines, engines, and micro heat exchangers demand ultra high pressure and temperature withstanding microchannels. This paper focuses on design and analysis of such microchannels fabricated using LTCC technology. Extensive FE simulations and analysis are carried out to characterize various design parameters enabling their proper selection. An empirical model with nondimensional variables is proposed to extend applicability of results to high-pressure microchannels of other materials and a typical range of dimensions. Several microchannels are fabricated and tested to pressures upto 8 MPa. Results show that the radius at the corners of microchannels is a significant governing parameter.