S. Berger, O. Raslin, H. Gilboa, E. Iskevitch, H. Spielberg, S. Levy
{"title":"Nucleation and growth of hemispherical-grained Si by rapid thermal CVD","authors":"S. Berger, O. Raslin, H. Gilboa, E. Iskevitch, H. Spielberg, S. Levy","doi":"10.1016/S0965-9773(99)00389-X","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":18878,"journal":{"name":"Nanostructured Materials","volume":"8 1","pages":"1041-1053"},"PeriodicalIF":0.0000,"publicationDate":"1999-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nanostructured Materials","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1016/S0965-9773(99)00389-X","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}