Modification of Sensing Properties of Thin Polymer Films by VUV Irradiation

Abstract

The use of patternable polymeric films and their subsequent VUV irradiation treatment to engineer individual sensitivities in chemical sensor arrays is proposed. The structural changes of irradiated areas involve scission of polymeric chains, cross-linking and formation of new bonds. In addition, 157 nm induces surface and volume morphological changes in the micro/nano domain with different shapes, depending on the irradiation conditions. The effect of VUV irradiation on the swelling properties of polymethylmethacrylate (PMMA) thin films in certain analytes is studied using white light reflectance spectroscopy. The relative expansion of the PMMA film was clearly found to depend on the irradiation conditions.