Relationship between electric properties and surface flatness of (ZnO)x(InN)1−x films on ZnO templates

Abstract

We have studied effects of deposition temperature on electrical properties of (ZnO)_x(InN)_1-x (ZION) films on ZnO templates. With increasing the deposition temperature from RT to 450°C, the electron mobility decreases from 93 cm²/Vs to 70 cm²/Vs and the carrier density increases from 1.8×10¹⁹ cm^-3 to 3.4×10¹⁹ cm^-3. Furthermore, we found a correlation between electrical properties and root mean square (RMS) roughness of the films. These results suggest the surface flatness is an important parameter to determine electrical properties of ZION films.