Bondable Copper Substrates with Silver Solid Solution Coatings for High-Power Electronic Applications

Yongjun Huo, Chin C. Lee
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Abstract

Recently, silver solid solution phase with indium, (Ag)-xxIn, has been demonstrated to be one of potential candidates of metallic packaging material for future high-power electronics bonding and interconnection applications due to its great anti-tarnishing property and superior mechanical properties, such as high ductility and high ultimate tensile strength. To further explore and utilize its great potential for electronic packaging applications, the authors have studied the methodology in fabricating silver solid solution thin film layer on copper substrates as its coating layer, using E-beam evaporation deposition. The grazing incidence X-ray diffraction (GIXRD) and X-ray photoelectron spectra (XPS) were used in couple to study the surface composition and thin film quality of the silver-indium solid solution layer on copper substrates. High quality homogenous coating layers with various compositions have been successfully fabricated on copper substrates. It is worthwhile noticing that additional annealing steps are not needed to achieve the homogenous silver-indium solid solution layers. Subsequent solid-state bonding experiments have shown the good bondability of the resulting coating layer of silver-indium solid solution with their cross-sectional optical and scanning electron microscope (SEM) images. Accordingly, the resulting copper substrates with silver-indium solid solution coatings should have a great potential to be used as a highly conductive bondable substrate for high-power electronics and photonics applications.
大功率电子应用用银固溶体涂层的可粘合铜衬底
近年来,银与铟的固溶体(Ag)-xxIn因其优异的抗光泽性能和优异的机械性能,如高延展性和高极限拉伸强度,已被证明是未来大功率电子键合和互连应用的潜在金属封装材料之一。为了进一步挖掘和利用其在电子封装领域的巨大潜力,作者研究了利用电子束蒸发沉积技术在铜基底上制备银固溶体薄膜层作为其涂层的方法。采用掠入射x射线衍射(GIXRD)和x射线光电子能谱(XPS)相结合的方法研究了铜基底上银铟固溶层的表面组成和薄膜质量。在铜衬底上成功制备了各种成分的高质量均匀涂层。值得注意的是,不需要额外的退火步骤来获得均匀的银铟固溶层。随后的固相键合实验显示,所得到的银铟固溶体涂层具有良好的键合性,并获得了截面光学和扫描电子显微镜(SEM)图像。因此,所得到的具有银铟固溶体涂层的铜衬底应该具有很大的潜力,可以用作高导电的可粘合衬底,用于大功率电子和光子应用。
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