Experimental study of electrode materials for use in a cold-cathode oxygen discharge

M.G. Dowsett, E.H.C. Parker
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引用次数: 9

Abstract

A large range of elements has been evaluated for use as cathode, anticathode and anode materials in an oxygen cold-cathode discharge. The criterion for suitability of a particular material/electrode combination was based on the ability to extract from the source an ion beam suitable for high dynamic range SIMS. The effect of materials on long and short term stability and total beam current was investigated. The best materials were found to be A1 (all electrodes), Ni/Fe (cathode) and Ti (anticathode). Magnesium was found to be totally unsuitable as a cathode material in an oxygen discharge and caused extreme instability in both the extracted beam and the discharge. The reasons for beam current instability are related to departure from cylindrical symmetry in the source, and are discussed qualitatively.

冷阴极氧放电用电极材料的实验研究
在氧冷阴极放电中,已经评估了大量的元素作为阴极、反阴极和阳极材料的使用。特定材料/电极组合的适用性标准是基于从源提取适合高动态范围SIMS的离子束的能力。研究了材料对长、短期稳定性和光束总电流的影响。最佳材料是A1(所有电极)、Ni/Fe(阴极)和Ti(反阴极)。镁被发现是完全不适合作为阴极材料在氧放电和造成极端不稳定的提取束和放电。本文定性地讨论了束流不稳定的原因与源的圆柱对称偏离有关。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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