A Closed Form Solution for the Pull-in Voltage of the Micro Bridge with Initial Stress subjected to Electrostatic Loads

Yuh-Chung Hu, D.T.W. Lin, G.-D. Lee
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引用次数: 7

Abstract

This paper derives a closed form solution with fringing filed effects for the pull-in voltages of the micro fixed-fixed beam subjected to electrostatic loads and initial stress. The closed form solution is derived based on the Euler's beam theory and the energy method. The accuracy of the present closed form solution is verified through comparing with the experimentally measured data conducted in the published works. The error of the present closed form solution is within 1% compared to the experimentally measured data. The present closed form solution is more accurate than the past works and is very simple and highly accurate for implementation in the design and mechanical characterization of the micro devices.
静电荷载作用下具有初始应力的微桥拉入电压的闭合解
本文导出了微固定梁在静电载荷和初始应力作用下的拉入电压的带边场效应的封闭解。基于欧拉梁理论和能量法导出了闭型解。通过与已发表的实验测量数据的比较,验证了本文封闭解的准确性。与实验测量数据相比,该封闭形式溶液的误差在1%以内。本文提出的封闭形式解在微器件的设计和力学性能表征方面比以往的方法更精确,实现起来非常简单,精度很高。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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