Gas Flowin Nano-Channels: Thermal Transpirationmodelswith Application to a Si-Micromachinedknudsen Pump

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2007-06-10 DOI:10.1109/SENSOR.2007.4300636

N. Gupta, N. Masters, W. Ye, Y. Gianchandani

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引用次数: 10

Abstract

This paper presents a comparative study of performance of various analytical and semi-analytical models used for the analysis of rarefied gas flow, which is responsible for the phenomenon of thermal transpiration. In particular, these are evaluated in the context of the scaling analysis of a Si-micromachined monolithic Knudsen pump. Results from these models are verified using available experimental data and are benchmarked against the simulation results from direct simulation Monte Carlo (DSMC) technique. Characterization of Sharipov's model against the DSMC technique with the help of specially designed test cases predicts that Sharipov's model is potentially the most representative model for DSMC in this context. Finally, Sharipov's model is used to evaluate the sensitivity analysis of structural and performance parameters relevant for thermal transpiration. The analysis shows that for a 200 mum long channel on a well-insulated glass substrate, with a channel height of 100 nm and 10 mum width, provides a mass flow rate of 1.5times10-6 sccm with a DeltaT of 300degC.

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气体流动在纳米通道:热蒸腾模型与应用于硅微机械克努森泵

本文对用于分析引起热蒸腾现象的稀薄气流的各种解析和半解析模型的性能进行了比较研究。特别是，这些都是在硅微机械单片克努森泵的尺度分析的背景下进行评估。这些模型的结果使用可用的实验数据进行验证，并与直接模拟蒙特卡罗(DSMC)技术的模拟结果进行基准测试。在特殊设计的测试用例的帮助下，Sharipov的模型与DSMC技术的特性预测了Sharipov的模型在这种情况下可能是DSMC最具代表性的模型。最后，利用Sharipov模型对与热蒸腾有关的结构参数和性能参数进行敏感性分析。分析表明，在绝缘良好的玻璃衬底上，通道高度为100 nm，宽度为10 nm，长度为200 μ m的通道，质量流率为1.5倍10-6 sccm, DeltaT为300℃。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

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