Shape measurement of stressed mirror based on stereoscopic phase measuring deflectometry

Q3 Engineering

光电工程 Pub Date : 2020-08-31 DOI:10.12086/OEE.2020.190435

C. Zhenyi, Zhao Wen-chuan, Zhang Qican, Han Yu, Liu Yuankun

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引用次数: 0

Abstract

Stressed polishing technology transforms aspheric fabrication into spherical fabrication by applying pre-determined loads on the surface of the mirror. The key to achieve high precision of stressed polishing is to test the surface deformation with high precision. Stereoscopic phase measuring deflectometry was used to test the surface topography and the deformation of stressed mirror. After obtained unwrapped phase distribution, and combined with normal consistency constraint and gradient integral algorithm, the height distribution was finally obtained. Composition of systematic errors were simulated. Also, the errors were calibrated and removed by N-step averaging method in this system, which improved the measuring precision. In this paper, the surface topography and the deformation of a stressed mirror with a diameter of 320 mm, spherical radius of 5200 mm were measured. The measuring results were consistent with the corresponding result of CMM and finite element simulation, indicating that this proposed method is on the level of micron in terms of accuracy and more suitable for the test of stressed mirror compared with interferometer and CMM.

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基于立体相位测量偏转法的应力反射镜形状测量

应力抛光技术通过在反射镜表面施加预先确定的载荷，将非球面加工转化为球面加工。高精度地测试表面变形是实现应力抛光高精度的关键。采用立体相位测量偏转法对应力反射镜的表面形貌和变形进行了测试。在得到解包裹相位分布后，结合正态一致性约束和梯度积分算法，最终得到高度分布。模拟了系统误差的组成。采用n步平均法对测量误差进行了校正和去除，提高了测量精度。本文测量了直径为320 mm、球面半径为5200 mm的应力反射镜的表面形貌和变形。测量结果与三坐标测量机和有限元模拟的结果一致，表明该方法的精度在微米级，与干涉仪和三坐标测量机相比，更适合于应力反射镜的测试。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

光电工程 Engineering-Electrical and Electronic Engineering

CiteScore

2.00

自引率

0.00%

发文量

6622

期刊介绍：