Realization of robust μ control for the optical ultra-precision vibration isolation platform

Abstract

The μ control theory is based on the structural singular value, which is used in the control system of the active vibration isolation. It is used to solve the uncertainty of the optical ultra-precision instrument vibration isolation platform. And the wavelet theory is used to analyze the random vibration signal in the time-frequency domain and get the low frequency signal from the random vibration signal. Then the μ controller designed by the μ control theory is used to restrain the low frequency vibration. The experiment results prove that this method has shown good robustness and control precision in the vibration isolation of the optical ultra-precision instrument.