Advances in Deposition of Transition‐Metal Oxides from Metal Enolates

Patai's Chemistry of Functional Groups Pub Date : 2016-06-21 DOI:10.1002/9780470682531.PAT0910

H. Lang, David Adner, C. Georgi

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引用次数: 2

Abstract

This chapter is an update of part of a review published by our group elsewhere in Patai's Series; in addition, in this volume, chapters present the recent advances in the deposition of metals and oxides of main-group metals and rare-earth elements, all derived from metal enolates. Metal oxides are essential as common inorganic crude materials, possessing a manifold portfolio of applications because of their singular physical and chemical properties. Metal oxides are formed by straight vaporization from metal oxide sources, by evaporation of metals in an oxidizing atmosphere, or via wet chemistry, for example, the sol-gel process. Their industrial use includes protective coatings, electrical insulator materials, gate oxides, transparent conductors, piezoelectric materials, battery electrode materials, electrochromic devices, optical filters, laser-active media, wide-bandgap semiconductors, solar absorbers, and many others. Keywords: metal enolates; metal oxides; mixed metal oxides; metal β-diketonates; main-group elements; rare earth metal elements; deposition; gas-phase; wet chemistry

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金属烯醇化物沉积过渡金属氧化物的研究进展

本章是我们小组在Patai系列的其他地方发表的一篇综述的一部分更新;此外，在本卷中，各章介绍了金属沉积和主族金属氧化物和稀土元素的最新进展，所有这些都来自金属烯醇化物。金属氧化物是一种重要的普通无机原料，由于其独特的物理和化学性质，具有多种用途。金属氧化物是由金属氧化物源直接汽化形成的，通过金属在氧化气氛中的蒸发，或通过湿化学，例如，溶胶-凝胶过程。它们的工业用途包括保护涂层、电绝缘体材料、栅极氧化物、透明导体、压电材料、电池电极材料、电致变色器件、光学滤波器、激光有源介质、宽带隙半导体、太阳能吸收器等。关键词:金属烯醇化物;金属氧化物;混合金属氧化物;金属β-diketonates;主族元素;稀土金属元素;沉积;气相;湿法化学

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Patai's Chemistry of Functional Groups

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