Finite Element Analysis of SAW Propagation Characteristics in c-plane (0001) and a-plane (11-20) AlScN Thin Films

2019 IEEE International Ultrasonics Symposium (IUS) Pub Date : 2019-10-01 DOI:10.1109/ULTSYM.2019.8925570

N. Feil, N. Kurz, D. Urban, A. Altayara, B. Christian, A. Ding, A. Žukauskaitė, O. Ambacher

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引用次数: 5

Abstract

Al1−xScxN (AlScN) is known for its large elastic and piezoelectric constants and thus is a favorable material for applications in novel radio frequency (RF) components. We investigated a-plane AlScN on r-plane Al2O3 (AlScN(11-20)/Al2O3(1-102)). The surface acoustic wave (SAW) propagation properties of AlScN(11-20)/Al2O3(1-102) and AlScN(11-20)/Al2O3(1-102) were analyzed using finite element method (FEM) simulations and the results were compared. Rayleigh-type and Sezawa-type wave modes were identified and the acoustic parameters such as phase velocity, electromechanical coupling coefficient, and reflectivity were evaluated. An increased effective coupling of 5.5 % was detected for Rayleigh-type waves on AlScN(11-20)/Al2O3(1-102). The Sezawa-type modes show an even higher coupling up to 6.2 %. Furthermore, we detected increased reflectivity of AlScN(11-20) films compared to c-plane AlScN(0001). Our results reveal the potential of using a-plane AlScN for increasing the electromechanical coupling, which is needed for the upcoming piezo-acoustic filter requirements.

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SAW在c面(0001)和a面(11-20)AlScN薄膜中传播特性的有限元分析

Al1−xScxN (AlScN)以其大的弹性和压电常数而闻名，因此是新型射频(RF)元件应用的有利材料。我们研究了a-平面AlScN在r-平面Al2O3上(AlScN(11-20)/Al2O3(1-102))。采用有限元模拟方法对AlScN(11-20)/Al2O3(1-102)和AlScN(11-20)/Al2O3(1-102)的表面声波(SAW)传播特性进行了分析，并对结果进行了比较。识别了瑞利型和sezawa型波模，评估了相速度、机电耦合系数和反射率等声学参数。在AlScN(11-20)/Al2O3(1-102)上检测到瑞利型波增加了5.5%的有效耦合。sezawa型模式显示出更高的耦合，高达6.2%。此外，我们检测到AlScN(11-20)薄膜的反射率比c平面AlScN(0001)增加。我们的研究结果揭示了使用平面AlScN增加机电耦合的潜力，这是即将到来的压电声滤波器要求所需要的。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2019 IEEE International Ultrasonics Symposium (IUS)

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