Improved H2S and Cl2 Sensing Characteristics of Pure and Au Incorporated WO3 Thin Films

Abstract

Gas sensing properties of pure and Au incorporated WO3 thin films towards H2S and Cl2 have been investigated. The sensor films were able to detect H2S and Cl2 selectively at an operating temperature of 150 and 200 °C, respectively. Effect of gas concentration and Au loading have been investigated and correlated with the observed sensitivity values. Pure WO3 films exhibited better sensing characteristics towards H2S (S = 17, 10 ppm, 150 °C) while sensor film containing Au thickness of 21.6 nm exhibited a maximum sensitivity towards Cl2 (S = 89, 10 ppm, 200 °C)..