Chip-scale cavity-optomechanical accelerometer

T. Blasius, Alexander G. Krause, O. Painter
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Abstract

We demonstrate an optomechanical accelerometer using a v-groove fiber coupled photonic-crystal nanocavity integrated with a high-Q nanotethered test mass. The nanocavity frequency can be tuned to that of an input laser by on-chip capacitive actuators.
芯片级腔光机械加速度计
我们展示了一种使用v型槽光纤耦合光子晶体纳米腔与高q纳米系绳测试质量集成的光机械加速度计。纳米腔的频率可以通过片上电容致动器调谐到输入激光器的频率。
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