Sodium Chloride Concentration Measurement by Using Doping/Un-doping Poly-silicon Nanowire Device

Abstract

This work fabricates doping/un-doping poly-Si nanowire sensor with various lengths by using top-down technique for measuring salt concentration. Experimental results indicate that the resolution is proportional to the nanowire length and dopant concentration. But the sensitivity is inversely proportional to the length nanowire length. Moreover, the proposed sensor demonstrates 10 applications with similar current-time response and shows good repeatability.