Studies on the Effect of Pole Piece Shape for Saturated Single Pole Magnetic Lens

Abstract

Magnetic electron objective lens is of a great importance for electron microscope intended for high resolution. The present work investigates the objective properties of a single pole piece magnetic lens with different pole piece shapes. The results indicate that the lens with a spherical pole – face has the best resolution. Keywords: Finite element method; objective magnetic lenses; aberration PACS: 41.85