C. X. Yu, S. Zihlmann, Gonzalo Troncoso Fernández-Bada, J. Thomassin, F. Gustavo, É. Dumur, R. Maurand
{"title":"Magnetic field resilient high kinetic inductance superconducting niobium nitride coplanar waveguide resonators","authors":"C. X. Yu, S. Zihlmann, Gonzalo Troncoso Fernández-Bada, J. Thomassin, F. Gustavo, É. Dumur, R. Maurand","doi":"10.1063/5.0039945","DOIUrl":null,"url":null,"abstract":"We characterize niobium nitride $\\lambda/2$ coplanar waveguide resonators, which were fabricated from a 10nm thick film on silicon dioxide grown by sputter deposition. For films grown at 120°C we report a superconducting critical temperature of 7.4K associated with a normal square resistance of 1k$\\Omega$ leading to a kinetic inductance of 192pH/$\\Box$. We fabricated resonators with a characteristic impedance up to 4.1k$\\Omega$ and internal quality factors $Q_\\mathrm{i} > 10^4$ in the single photon regime at zero magnetic field. Moreover, in the many photons regime, the resonators present high magnetic field resilience with $Q_\\mathrm{i} > 10^4$ in a 6T in-plane magnetic field as well as in a 300mT out-of-plane magnetic field. These findings make such resonators a compelling choice for cQED experiments involving quantum systems with small electric dipole moments operated in finite magnetic fields.","PeriodicalId":8465,"journal":{"name":"arXiv: Mesoscale and Nanoscale Physics","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2020-12-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"20","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"arXiv: Mesoscale and Nanoscale Physics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1063/5.0039945","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 20
Abstract
We characterize niobium nitride $\lambda/2$ coplanar waveguide resonators, which were fabricated from a 10nm thick film on silicon dioxide grown by sputter deposition. For films grown at 120°C we report a superconducting critical temperature of 7.4K associated with a normal square resistance of 1k$\Omega$ leading to a kinetic inductance of 192pH/$\Box$. We fabricated resonators with a characteristic impedance up to 4.1k$\Omega$ and internal quality factors $Q_\mathrm{i} > 10^4$ in the single photon regime at zero magnetic field. Moreover, in the many photons regime, the resonators present high magnetic field resilience with $Q_\mathrm{i} > 10^4$ in a 6T in-plane magnetic field as well as in a 300mT out-of-plane magnetic field. These findings make such resonators a compelling choice for cQED experiments involving quantum systems with small electric dipole moments operated in finite magnetic fields.