Nickel-based Piezoresistive Sensors Obtained on Flexible Nanocellulose Substrate

V. Koval, V. Barbash, M. Dusheyko, V. Lapshuda, O. Yashchenko, A. Naidonov
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引用次数: 5

Abstract

In the paper the biopolymer substrates were made from nanocellulose (NC), which is extracted from organosolvent reed cellulose using 2,2,6,6-tetramethylpiperidin-1-oxyl reagent (TEMPO). Nickel-based thin films were deposited on the surface of nanocellulose by RF magnetron sputtering. The peculiarities of surface morphology and chemical composition of inorganic material on the surface of biopolymer substrate were studied. Flexible strain sensors were obtained from nickel busbars on the surface of nanocellulose. The influence of overall sizes of nickel busbars on piezoresistive parameters of flexible sensors was established. It was determined that the maximum strain sensitivity is observed for a nickel busbar with a width of 1 mm, a thickness of 250 nm, a length of 15 mm and was 195,8⋆ 10-3 %. The magnitude of drift in time was 0,17 %/min. Obtained strain sensors were tested on mechanical strength depending on nickel busbar sizes. It was shown that the presence of nickel thin film increases the strength of strain sensors by 40%: from 13.8 MPa for pure nanocellulose to 19.5-19.6 MPa for nanocellulose with nickel thin films.
基于柔性纳米纤维素基板的镍基压阻传感器
采用2,2,6,6-四甲基胡椒碱-1-氧试剂(TEMPO)从有机溶剂芦苇纤维素中提取纳米纤维素(NC),制备生物聚合物底物。采用射频磁控溅射技术在纳米纤维素表面沉积镍基薄膜。研究了生物聚合物衬底表面无机材料的表面形貌和化学组成的特性。利用纳米纤维素表面的镍母线制备了柔性应变传感器。建立了镍母线整体尺寸对柔性传感器压阻参数的影响。结果表明,对于宽度为1 mm,厚度为250 nm,长度为15 mm的镍母线,最大应变灵敏度为195,8 - 10- 3%。时间漂移幅度为0.17% /min。根据镍母线尺寸对得到的应变传感器进行机械强度测试。结果表明,镍薄膜的存在使应变传感器的强度提高了40%:从纯纳米纤维素的13.8 MPa提高到含镍薄膜的纳米纤维素的19.5-19.6 MPa。
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