R. Schreutelkamp, J. Custer, J. R. Liefting, W. X. Lu, F. Saris
{"title":"Pre-amorphization damage in ion-implanted silicon","authors":"R. Schreutelkamp, J. Custer, J. R. Liefting, W. X. Lu, F. Saris","doi":"10.1016/0920-2307(91)90001-4","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":100891,"journal":{"name":"Materials Science Reports","volume":"134 1","pages":"275-366"},"PeriodicalIF":0.0000,"publicationDate":"1991-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"99","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Materials Science Reports","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1016/0920-2307(91)90001-4","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}