Resonant cavity coupled infrared detectors with high detectivity operating at room temperature

Abstract

A spectrally selective uncooled long wave infrared detector with peak detectivity between 3×10⁹ cm Hz^1/2/W and 4.4×10⁹ cm Hz^1/2/W is reported. The detector is fabricated using silicon microfabrication techniques and integrates a thermoelectric readout with a resonant optical cavity to achieve wavelength selective absorption.